2 crystal seat maintenance, 1 required equipment – INFICON Crystal 12 Sensor User Manual
Page 46
4 - 2
07
4-
39
8-
P1A
Crystal12 Sensor Operating Manual
4.2 Crystal Seat Maintenance
In dielectric and organic material coating applications, the surface where the crystal
contacts the crystal seat may require periodic cleaning. Since most dielectrics are
insulators, any buildup due to blow-by will eventually cause erratic or poor electrical
contact between the crystal and the sensor body. This buildup will also cause a
reduction in thermal transfer from the crystal to the sensor body. Both of these will
result in noisy operation and early crystal failure.
Cleaning may be accomplished by gently buffing the crystal seating surface with a
white Scotch-Brite™ pad followed by an ultrasonic bath in soap solution followed
by thorough rinsing in deionized water and drying or by ultrasonic cleaning and
rinsing only.
CAUTION
The crystal seating surface is machined to a very fine
finish (16 micro inches rms). This high quality finish is
essential to provide good electrical and thermal contact
with the crystal. Applying excessive force during
cleaning or using overly abrasive cleaning materials may
damage this finish and reduce sensor performance.
4.3 Alignment Instruction for Crystal12 Sensor (IPN 750-667)
During shipment, units may vibrate slightly out of position. This does not mean
realignment is required. The unit will return to the centered position the first time it
is pneumatically activated.
The unit shipped to you has been aligned at the factory, no further alignment is
required.
NOTE: Realignment is only required if the unit has been disassembled for any
reason, such as evaporant material removal, or any electrical problem that
may occur, or if the ratchet (item 29,
) is loosened,
or removed. This procedure is critical and must be carefully followed.
The unit, when properly aligned, will index the crystal to a position that is closely
centered within the aperture provided in the front deposition shield. The unit must
be aligned if this condition does not exist.
4.3.1 Required Equipment
5/64" allen wrench (Included in 750-268 Kit)
1/16" allen wrench (Included in 750-268 Kit)
3/32" allen wrench (Included in 750-268 Kit)