Further information – INFICON Stripe CDG100Dhs 0.1 ... 1000Torr / mbar User Manual
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Further Information
[1] www.inficon.com
Operating Manual
Single-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[2] www.inficon.com
Operating Manual
Two- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[3] www.inficon.com
Communication Protocol
EtherCAT CDGxxxDxx
tira68e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[4] www.inficon.com
Kommunikationsanleitung
Diagnostic Port via T-Gauge
tira84e1
INFICON AG, LI–9496 Balzers, Liechtenstein
[5] ETG.5003.1: Semiconductor Device profile – Part 1:
Common Device Profile (CDP)
[6] ETG.5003.2080: Semiconductor Device profile – Part
2080: Specific Device Profile (SDP): Vacuum Pressure
Gauge