INFICON Edge CDG045D2 1 … 1000Torr / mbar User Manual
Page 40
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tina86e1 (2013-11)
[4] www.inficon.com
Communication Protocol
RS323C Interface
tira49d1 (German)
tira49e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein
[5] www.inficon.com
Communication Protocol
EtherCAT CDG045D2, CDG100D2
tira68e1 (English only)
INFICON AG, LI–9496 Balzers, Liechtenstein
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