INFICON BPG400 ATM to Ultra-High Vacuum Gauge User Manual
Page 56
56
tina03e1-b (2004-02) BPG400 v1.om
The gas type dependence in the pressure range 10
-2
… 1 mbar can be compen-
sated by means of the following formula:
p
eff
= C × indicated pressure
where
Gas type
Calibration factor C
Air, O
2
, CO
1.0
N
2
0.9
CO
2
0.5
Water vapor
0.7
Freon 12
1.0
H
2
0.5
He
0.8
Ne
1.4
Ar
1.7
Kr
2.4
Xe
3.0
(The above calibration factors are mean values.)
The gas type dependence in the pressure range <10
-3
mbar can be compensated
by means of the following formula (gauge adjusted for air):
p
eff
= C × indicated pressure
where
Gas type
Calibration factor C
Air, O
2
, CO, N2
1.0
N
2
1.0
He
5.9
Ne
4.1
H
2
2.4
Ar
0.8
Kr
0.5
Xe
0.4
(The above calibration factors are mean values.)
A mixture of gases and vapors is often involved. In this case, accurate
determination is only possible with a partial-pressure measuring instru-
ment.
Calibration in pressure range
10
-2
… 1 mbar
Calibration in pressure range
<10
-3
mbar