INFICON BPG400 ATM to Ultra-High Vacuum Gauge User Manual

Page 56

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56

tina03e1-b (2004-02) BPG400 v1.om

The gas type dependence in the pressure range 10

-2

… 1 mbar can be compen-

sated by means of the following formula:

p

eff

= C × indicated pressure

where

Gas type

Calibration factor C

Air, O

2

, CO

1.0

N

2

0.9

CO

2

0.5

Water vapor

0.7

Freon 12

1.0

H

2

0.5

He

0.8

Ne

1.4

Ar

1.7

Kr

2.4

Xe

3.0

(The above calibration factors are mean values.)

The gas type dependence in the pressure range <10

-3

mbar can be compensated

by means of the following formula (gauge adjusted for air):

p

eff

= C × indicated pressure

where

Gas type

Calibration factor C

Air, O

2

, CO, N2

1.0

N

2

1.0

He

5.9

Ne

4.1

H

2

2.4

Ar

0.8

Kr

0.5

Xe

0.4

(The above calibration factors are mean values.)

A mixture of gases and vapors is often involved. In this case, accurate
determination is only possible with a partial-pressure measuring instru-
ment.

Calibration in pressure range
10

-2

… 1 mbar

Calibration in pressure range
<10

-3

mbar

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