Bronkhorst IN-FLOW User Manual
Page 7
BRONKHORST HIGH-TECH B.V.
TABLE OF CONTENTS
1
Introduction ................................................................................................................................................... 9
1.1
General description ................................................................................................................................ 9
1.1.1
Gas flow .......................................................................................................................................... 9
1.1.2
Liquid flow ....................................................................................................................................... 9
1.1.3
Pressure ......................................................................................................................................... 9
1.1.4
Housings ......................................................................................................................................... 9
1.1.5
Valves ........................................................................................................................................... 11
1.2
Sensor principles ................................................................................................................................. 12
1.2.1
Gas flow sensors (by-pass measurement) ................................................................................... 12
1.2.2
Gas flow sensors (direct mass flow measurement, CTA based) ................................................. 12
1.2.3
Liquid flow sensors ....................................................................................................................... 12
1)
The
µ
-FLOW model for flowrates up to 2 g/h. ......................................................................................... 12
2)
The CTA based LIQUI-FLOW model for flow rates up to approximately 1000 g/h. ................................ 13
1.2.4
Pressure sensor ........................................................................................................................... 13
1.3
Valve principles .................................................................................................................................... 13
1.3.1
Solenoid valve............................................................................................................................... 13
1.3.2
Vary-P valve .................................................................................................................................. 13
1.3.3
Pilot operated valve ...................................................................................................................... 14
1.3.4
Bellows valve ................................................................................................................................ 14
1.4
K
v
-value calculation .............................................................................................................................. 14
1.4.1
For gases ...................................................................................................................................... 14
1.4.2
For liquids ..................................................................................................................................... 15
1.4.3
Maximum pressure drop ............................................................................................................... 16
1.5
Sensors and laminar flow devices ....................................................................................................... 16
1.6
Conversion factors ............................................................................................................................... 17
1.6.1
Gas conversion factors (by-pass measurement) .......................................................................... 17
1.6.2
Gas Conversion Factors (direct mass flow measurement, CTA-based) ...................................... 18
1.6.3
Liquid Conversion Factors ............................................................................................................ 19
1.6.4
Software for conversion factor calculation .................................................................................... 19
2
Installation ................................................................................................................................................... 20
2.1
Receipt of equipment ........................................................................................................................... 20
2.2
Return shipment ................................................................................................................................... 20
2.3
Service ................................................................................................................................................. 20
2.4
Mounting .............................................................................................................................................. 21
2.5
In-line filter ........................................................................................................................................... 21
2.6
Fluid connections ................................................................................................................................. 21
2.7
Piping ................................................................................................................................................... 22
2.8
Electrical connections .......................................................................................................................... 22
2.9
Caution ................................................................................................................................................. 22
2.10
Supply pressure ............................................................................................................................... 23
2.11
System purging ................................................................................................................................ 23
2.12
Seals ................................................................................................................................................ 23
2.13
Equipment storage ........................................................................................................................... 23
2.14
Electromagnetic compatibility ........................................................................................................... 23
2.14.1
Conditions for compliance with EMC requirements ...................................................................... 23
3
OPERATION ............................................................................................................................................... 25
3.1
General ................................................................................................................................................ 25
3.2
Power and warm-up ............................................................................................................................. 25
3.3
Zeroing ................................................................................................................................................. 25
3.4
Start-up ................................................................................................................................................ 26
3.5
Operating conditions ............................................................................................................................ 26
3.6
Instrument performance ....................................................................................................................... 26
3.6.1
Sensors ......................................................................................................................................... 26
3.6.2
Controllers .................................................................................................................................... 26
3.7
Manual operation ................................................................................................................................. 26
3.8
Analog operation .................................................................................................................................. 27
3.9
BUS / digital operation ......................................................................................................................... 27
4
Maintenance ................................................................................................................................................ 28
4.1
General ................................................................................................................................................ 28
4.2
Gas flow sensor ................................................................................................................................... 28