INFICON SQC-222 Thin Film Deposition Controller - Manual (Page 29)

Chapter 2 Operation
2-10
2.6 Source Setup
The SQC-222 controls deposition rate by varying the control voltage to an external
evaporation (source) supply.
The SQC-222 output voltage range is set in the Systems Params menu. For the
supply connected to each output, set the Scale to the control voltage that corresponds
to 100% output on the source supply. The SQC-222 uses 0 volts as 0% output, and the
programmed value as 100% output. Scale values from –10 volts to 10 volts are
possible.
If you find that very small changes in control voltage yield large changes in deposition
rate, you can lower the Scale value to decrease the dynamic range. Also, each Film
has a Max Power and Slew Rate parameter that may be used to customize response to
that film.