INFICON SQC-222 Thin Film Deposition Controller - Manual (Page 74)

Chapter 5 Communications
5-4
Command: L
Parameters: [1..6]
Description: Read the current Rate for a channel.
Example: L1 A9.32 Channel one’s rate is 9.32 Angstroms/S
Command: M
Parameters: None.
Description: Read the current Average Rate.
Example: M A10.42 Average Rate is 10.42 Angstroms/S
Command: N
Parameters: [1..6]
Description: Read the current thickness for a channel.
Example: N4 A1.187 Channel four’s Thickness is 1.187 Kilo Angstroms.
Command: O
Parameters: None.
Description: Read the current Average Thickness
Example: O A2.376 The current Average Thickness is 2.376 kilo
Angstroms.
Command: P