INFICON SQC-222 Thin Film Deposition Controller - Manual (Page 4)

Table of Contents
Chapter 1 Quick Start
1.0 Introduction...................................................................................................... 1-1
1.1 Front Panel ...................................................................................................... 1-1
1.2 Rear Panel....................................................................................................... 1-2
1.3 System Connections........................................................................................ 1-3
1.4 Installation ....................................................................................................... 1-4
1.5 Menus.............................................................................................................. 1-5
1.6 Thin Film Process Overview ............................................................................ 1-7
1.7 Building a Process........................................................................................... 1-8
1.8 Depositing a Film............................................................................................. 1-11
Chapter 2 Operation
2.0 Introduction...................................................................................................... 2-1
2.1 Definitions........................................................................................................ 2-1
2.2 Defining a Film................................................................................................. 2-1
2.3 Defining a Process .......................................................................................... 2-5
2.4 Sensor Setup................................................................................................... 2-7
2.5 Source Setup................................................................................................... 2-10
2.6 Running a Process .......................................................................................... 2-11
2.7 Loop Tuning..................................................................................................... 2-15
2.8 Troubleshooting............................................................................................... 2-17
Chapter 3 Menus
3.0 Introduction...................................................................................................... 3-1
3.1 Main Menu 1.................................................................................................... 3-2
3.2 Main Menu 2.................................................................................................... 3-3
3.3 Main Menu 3.................................................................................................... 3-4
3.4 Quick Setup Menu ........................................................................................... 3-5
3.5 Process Menu.................................................................................................. 3-7
3.6 Layer Menus.................................................................................................... 3-9
3.7 Cut/Copy Menu................................................................................................ 3-12
3.8 Film Menu........................................................................................................ 3-14
3.9 System Parameters Menu ............................................................................... 3-21
3.10 PLC I/O........................................................................................................... 3-26