Chapter 4 maintenance, 0 introduction, 1 cleaning – INFICON SQC-222 Thin Film Deposition Controller User Manual

Page 67

Advertising
background image

Chapter 4 Maintenance

4-1

4.0 Introduction

This section covers maintenance, cleaning, software upgrades, and the installation of
optional accessories.

W

ARNING

: There are no adjustments or user-serviceable parts inside the SQM-160.

For maintenance or repair, contact

Sigma Instruments
120 Commerce Drive, Unit 1
Fort Collins, CO 80524 USA
970-416-9660

4.1 Cleaning

Use a damp cloth, wetted with water or a mild detergent, to clean the outer surfaces.

Advertising