INFICON SQC-222 Thin Film Deposition Controller User Manual
Page 5
Chapter 4
Maintenance & Installation
4.0 Introduction...................................................................................................... 4-1
4.1 Cleaning .......................................................................................................... 4-1
4.2 Software Upgrades.......................................................................................... 4-2
4.3 Option Card Installation ................................................................................... 4-3
4.4 Half-Rack Adapter ........................................................................................... 4-3
4.5 Full Rack Adapter ............................................................................................ 4-4
Chapter 5
Communications
5.0 Introduction...................................................................................................... 5-1
5.1 SQC-222 Comm Program ............................................................................... 5-1
5.2 Protocol ........................................................................................................... 5-1
5.3 Commands ...................................................................................................... 5-2
Appendix
A. Material Parameters
B. Specifications
C. I/O Connections
D. Handheld Remote Controller
E. Declaration of Conformity