2 pre-installation sensor check, 1 ic/5 deposition controller, Figure 2-2 – INFICON CrystalSix Sensor User Manual
Page 18
2 - 4
IP
N 07
4-
15
5L
CrystalSix Operating Manual
Figure 2-2 Using the Crystal Puller
2.2 Pre-installation Sensor Check
Prior to installing the sensor in the vacuum system, you should make certain that it
is in proper working condition by following the procedure outlined below.
2.2.1 IC/5 Deposition Controller
1
Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(microdot/BNC).
2
Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connector
of the feedthrough.
3
Connect the other end of the 6" XIU cable to the connector of the XIU/5 (IPN
760-600-G1).
4
Connect one end of the XIU/5 cable (IPN 600-1039-Gxx) to the mating
connector of the XIU/5.
5
Connect the other end of the XIU/5 cable to a sensor channel at the rear of the
controller.
6
Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero thickness. The display should indicate 0/ or +/-.001 KÅ. Crystal
life should read from 0 to 5%.
7
Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.