INFICON CrystalSix Sensor - Manual (Page 20)

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CrystalSix Operating Manual
2.2.4 IC-6000 or XTC Deposition Controller
NOTE: See section 2.7 on page 2-15 .
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter
(Microdot/BNC).
2 Connect one end of the 6" OSC cable (IPN 013-070) to the receptacle on the
feedthrough.
3 Connect the other end of the 6" OSC cable to the receptacle marked XTAL on
the oscillator (IPN 013-001).
4 Connect the end of the oscillator source/sensor cable (IPN 013-067) to the
remaining BNC receptacle on the oscillator.
5 Connect the other end of the OSC source/sensor cable to the receptacle
marked OSC on the rear panel of the controller.
6 Connect power to the controller and set power switch to ON. Set density at 1.00
gm/cc, and zero the thickness. The display should indicate 0/ or +/-0.001 KÅ.
Crystal life should read from 0 to 5%.
7 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 KÅ
should appear on the display. When the moisture evaporates, the thickness
indication should return to approximately zero.
If the above conditions are observed, you can assume the sensor is in proper
working order and may be installed.
2.3 General Guidelines for CrystalSix Sensor
Figure 2-3 , Figure 2-4 , and Figure 2-5 show the typical installation of an INFICON
water-cooled crystal sensor in the vacuum process chamber. Use the illustration
and the following guidelines to install your sensors for optimum performance and
convenience.