INFICON CrystalSix Sensor - Manual (Page 47)

4 - 11
IP
N 07
4-
15
5L
CrystalSix Operating Manual
8. Thermal instability:
large changes in thickness
reading during source
warm-up (usually causes
thickness reading to
decrease) and after the
termination of deposition
(usually causes thickness
reading to increase) 8a. Crystal not properly
seated. 8a. Check and clean
crystal seating surface of
the crystal holder.
8b. Excessive heat input
to the crystal. 8b. If heat is due to
radiation from the
evaporation source, move
sensor further away from
source and use sputtering
crystals for better thermal
stability.
8c. No cooling water. 8c. Check cooling water
flow rate. Flow rate should
be minimum of 150-200
cc/min @ 30 °C max.
8d. Poor thermal transfer
from water tube to body. 8d. Use a new water tube
whenever the clamping
assembly has been
removed from the body. If
a new water tube is not
available, use a single
layer of common
aluminum foil between the
cooling tube and the
sensor body, if your
process allows.
Table 4-1 Troubleshooting (continued)
Symptom Cause Remedy