Specifications, Pecifications – INFICON Maxtek PM-700 Plating Monitor User Manual
Page 10
PM-700 SERIES PLATING MONITOR
2
1.1 SPECIFICATIONS
PM-700
Series
Common
Specifications
Monitor
accuracy: 0.5 %
Basic
measurement
resolution:
Thickness:
0.01
µ
g/cm
2
Frequency: 0.5 Hz @ 5 MHz
Display
Resolution:
Weight:
0.01
µ
g/cm
2
Efficiency:
0.1%
Frequency:
0.1
Hz
Discrete
Outputs:
Preplate
achieved.
Thickness
achieved.
Low
rate
alarm.
High
rate
alarm.
Crystal
failed.
Spare.
Spare.
Level: 0 to 5 Vdc CMOS logic level.
Source
impedance: 100
ohm.
Discrete
Inputs:
Start
Preplate.
Start
Plate.
Start
Deplate
Stop
or
Reset.
Spare.
Logic level: Ground true.
Internal
4.7
k
ς
pull-up to 5 Volt.
DAC
Interface:
Outputs:
Two
independent
analog
outputs
Range: 0
to
5.0
Vdc
Accuracy:
± 3% of range + 1% of full scale.
Linearity: 0.5%
of
full
scale
Output
impedance:
10
k
ς
± 2%
Control inputs: Zero, Full Scale
Logic
level:
Ground
true.
Internal
4.7
k
ς
pull-up to 5 volt.