INFICON Maxtek PM-700 Plating Monitor User Manual

Page 5

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vii

4.4.5.6

A-B)% Display ................................................................................................................ 27

4.4.6

Simulation Mode ..........................................................................................................27

4.5

P

ARAMETERS

.....................................................................................................................27

4.5.1

Viewing and modifying ................................................................................................27

4.5.2

Hidden parameters.......................................................................................................28

4.5.3

Descriptions .................................................................................................................28

4.5.3.1

Mode Menu ..................................................................................................................... 30

4.5.3.2

Process Menu .................................................................................................................. 32

4.5.3.3

Bath Menu ....................................................................................................................... 34

4.5.3.4

Display Menu .................................................................................................................. 36

4.5.3.5

Setup Menu ..................................................................................................................... 37

4.5.4

Restoring to Default Values .........................................................................................39

4.6

S

TATUS

A

SSESSMENT

........................................................................................................39

4.6.1

Monitor Status..............................................................................................................39

4.6.2

Probe Status .................................................................................................................39

4.7

S

WAPPING PROBES

.............................................................................................................40

4.7.1

Manual probe swapping ..............................................................................................40

4.7.1.1

Assessing the probe status prior to initiating the swap. ................................................... 40

4.7.1.2

Preplating prior to swapping............................................................................................ 40

4.7.1.3

Commanding the swap. ................................................................................................... 40

4.7.1.4

Deplating the Standby Probe. .......................................................................................... 40

4.7.1.5

Manual termination of Preplate or Deplate on the Standby probe................................... 40

4.7.2

Automatic probe swapping ..........................................................................................41

4.7.2.1

Auto probe swap on active probe failure. ........................................................................ 41

4.7.2.2

Alternating Probe mode................................................................................................... 41

4.7.2.3

Failed Standby Probe inhibits automatic swap. ............................................................... 41

4.8

E

XTERNAL

I

NTERFACE

.......................................................................................................41

4.8.1

Discrete Inputs .............................................................................................................41

4.8.2

Discrete Outputs ..........................................................................................................43

4.8.3

Digital to Analog Converters .......................................................................................45

4.8.3.1

Thickness DAC................................................................................................................ 45

4.8.3.2

Rate DAC ........................................................................................................................ 45

4.8.4

Computer Connection ..................................................................................................47

4.8.4.1

RS-232 Interface.............................................................................................................. 48

4.8.4.2

Protocol ........................................................................................................................... 48

4.8.4.3

Remote Control ............................................................................................................... 49

4.8.4.3.1

Upload Parameter Store (Instruction 10h).................................................................. 49

4.8.4.3.2

Restore Parameter Store (Instruction 20h) ................................................................. 54

4.8.4.3.3

Remotely Activate (Instruction 30h) .......................................................................... 54

4.8.4.4

Remote Monitoring ......................................................................................................... 55

4.8.4.4.1

Upload Machine Status (Instruction 40h) .................................................................. 55

4.8.4.5

Data Logging ................................................................................................................... 59

4.8.4.5.1

Establish automatic data logging................................................................................ 59

4.8.4.5.2

Single data log............................................................................................................ 62

5.

TROUBLESHOOTING ......................................................................................................63

5.1

T

ROUBLE

-S

HOOTING

A

IDS

.................................................................................................63

5.2

F

AIL

M

ESSAGES

F

OLLOWING

P

OWER

O

N

...........................................................................64

5.2.1

Power Failure ..............................................................................................................64

5.2.2

Sensor Probe Failure ...................................................................................................65

5.2.3

Invalid Parameters.......................................................................................................65

5.2.4

RAM Failure ................................................................................................................65

5.2.5

ROM Failure................................................................................................................65

5.3

P

ROBE

F

AILED

I

NDICATION

................................................................................................65

6.

APPENDIX ..........................................................................................................................67

6.1

T

HEORY OF THE

Q

UARTZ

C

RYSTAL

M

ICROBALANCE

........................................................67

6.1.1

Crystal Frequency........................................................................................................67

6.1.2

Crystal Health Calculation ..........................................................................................67

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