Sample process, Ample, Rocess – INFICON Maxtek PM-700 Plating Monitor User Manual

Page 23: Able, Arameter, Alues

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PM-700 SERIES PLATING MONITOR

15

3.1 SAMPLE

PROCESS

Suppose a PM-700 monitor is to be used to continuously measure the plating rate
and thickness in an electroless nickel bath, giving a deposit with 6%
phosphorus
. Since this bath will not initiate plating on a pure gold surface, the
sensor crystal will have to be electrolytically preplated with, for example, .5
microns
of nickel at a controlled rate in order to support subsequent autocatalytic
electroless plating. Assume that the desired plating thickness endpoint is 20
microns
and it is desired that the plating monitor warns the operator if the plating
rate falls outside the normal limits of .100 ±0.02 micron/min
. It is also desired
that the total elapsed time since introduction of the work into the plating bath be
displayed. These parameters will be established for process number 3.

Given the above example, the following list of parameters will need to be
programmed into the monitor.


Table 2 Sample Process Parameter Values

Menu

Parameter

Value

Process Menu

Process

Number 3

Process Menu

Endpoint Setting

20.00

Process Menu

Min Rate Alarm

0.080

Process Menu

Max Rate Alarm

0.120

Mode Menu

Sample

Off

Bath Menu

Bath

Ni 6%P

Bath Menu

Type

Elecless

Bath Menu

Preplate Thckness

0.500

Bath Menu

Preplate Rate

0.050

Display Menu

Parm Status Display

Elaptime

Setup Menu

Simulate

Off


Since the above parameters will be established for process number 3, the first
thing to do is select process number 3 as the current process. You can do this by
going to the Process parameter in the Process Menu and use the SELECT arrow
buttons to find Number 3. Then follow the above list to program the rest of the
parameters.

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