KEYENCE LS-9030D - Manual (Page 4)

4 E LS-9006D/LS-9030D
Characteristics
Measurement range and accuracy
z LS-9006D
* Zero point is the intersection of the optical center of each X and Y axis
measurement range.
z LS-9030D
* Zero point is the intersection of the optical center of each X and Y axis
measurement range.
Temperature characteristics
The following shows the typical examples of the temperature characteristics.
z LS-9006/LS-9006M/LS-9006D (X-axis, Y-axis)
Unit: μm
φ
z LS-9030/LS-9030M/LS-9030D (X-axis, Y-axis)
Unit: μm
φ
Zero point *1
180
89
±1.5 μm
±0.5 μm
Y-axis head
receiver
X-axis head
receiver
±0.5
±0.5
2
4
2
4
6
6
X-axis
measurement area
Y-axis
measurement area
Unit: mm
Temperature 0 ° C 10 ° C 20 ° C 30 ° C 40 ° C 50 ° C
Drift -0.18 -0.06 0.00 0.08 0.12 0.19
Temperature 0 ° C 10 ° C 20 ° C 30 ° C 40 ° C 50 ° C
Drift 0.28 0.14 0.00 -0.07 -0.25 -0.4
200
145
±0.5
±0.5
10
20
10
20
±5 μm
±2 μm
Zero point *1
Y-axis head
receiver
X-axis head
receiver
X-axis
measurement area
Y-axis
measurement area
30
30
Unit: mm