Brooks Instrument SLAMf Series - Manual (Page 11)

1-5
Section 1 - Introduction Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
Command/Setpoint Input (Analog I/O capabilities)
Voltage and Current type inputs (but not both simultaneously) are
supported.
Setpoint input types are software selectable as follows:
0 - 5 Vdc
1 - 5 Vdc
0 - 20 mA
4 - 20 mA
Voltage Setpoint Input Specifications
Nominal Range: 0 - 5 Vdc
Full Range: 0 - 5.5 Vdc
Absolute Max.: 20 V
(Without Damage)
Input Impedence: >990 k
Ω
Current Setpoint Input Specifications
Nominal Range: 4 - 20 mA or 0 - 20 mA
Full Range: 0 - 22 mA
Absolute Max.: 25 mA
(Without Damage)
Input Impedence: 125
Ω
Flow Output (Analog I/O version only)
Voltage and current type outputs (but not both simultaneously) are
supported. Flow output types are selectable as follows.
0 - 5 Vdc
1 - 5 Vdc
0 - 20 mA
4 - 20 mA
Flow Output (Voltage) Specifications
Nominal Range: 0 - 5 Vdc, 1 - 5 Vdc
Full Range: -0.5 - 5.5 Vdc (@ 0-5 Vdc); 0.6 - 5.5 Vdc (@ 1-5 Vdc)
Min. Load Resistance: 2 k
Ω
Flow Output (Current) Specifications
Nominal Range: 4 - 20 mA or 0 - 20 mA
Full Range: 0-22 mA (@ 0-20 mA); 3.8-22 mA (@ 4-20 mA)
Max. Load: 380
Ω (for supply voltage < 16 Vdc)
580
Ω (for supply voltage > 16 Vdc)
Valve Override Signal (Analog I/O version only)
The Valve Override Signal (VOR) is implemented as an analog input which
measures the voltage at the input and controls the valve based upon the
measured reading as follows:
Floating / Unconnected: Instrument controls valve to command setpoint
VOR < 0.3 Vdc: Valve Closed
VOR > 4.8 Vdc: Valve Open
0.3 Vdc > VOR > 4.8 Vdc: Undefined