Brooks, Digital mfc's and mfm's – Brooks Instrument SLAMf Series User Manual

Page 30

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2-6

Section 2 - Installation

Installation and Operation Manual

X-TMF-SLAMf-MFC-eng

Part Number: 541B032AAG

April, 2013

Brooks

®

Digital MFC's and MFM's

Figure 2-2 Common Electrical Hookups, Voltage I/O Version

Figure 2-1 Analog I/O Pin Connections, Top View Uncovered

*BROOKS READ OUT MFC / MFM

FUNCTION

WIRE

SIDE SUB D (15 PIN)

PIN

TERMINAL STRIP

COLOR

6

1

Setpoint, Common (-)

BLACK

10

2

Flow Signal, 0(1)-5 volt, Output (+)

WHITE

9

3

TTL Alarm, Open Collector, Output (+)

RED

2

4

Flow Signal, 0(4)-20 mA, Output (+)

GREEN

13

5

Power Supply, +13.5 Vdc to +27 Vdc (+)

ORANGE

N/A

6

Not Connected

N/A

3

7

Setpoint, 0(4)-20 mA, Input (+)

WHT/BLK

5

8

Setpoint, 0(1)-5 volt, Input (+)

RED/BLK

12

9

Power Supply, Common (-)

GRN/BLK

8

10

Flow Signal, Common, Output (-)

ORG/BLK

N/A

11

Reference, +5 Vdc, Output (+)

N/A

7

12

Valve Override, Input

BLK/WHT

N/A

13

Calibration Select, Input

N/A

N/A

14

RS-485, Common B (-)

N/A

N/A

15

RS-485, Common A (+)

N/A

* Brooks Read Out Models 0151, 0152, 0154, 0254

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