Brooks, Digital mfc's and mfm's – Brooks Instrument SLAMf Series User Manual
Page 30
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Section 2 - Installation
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks
®
Digital MFC's and MFM's
Figure 2-2 Common Electrical Hookups, Voltage I/O Version
Figure 2-1 Analog I/O Pin Connections, Top View Uncovered
*BROOKS READ OUT MFC / MFM
FUNCTION
WIRE
SIDE SUB D (15 PIN)
PIN
TERMINAL STRIP
COLOR
6
1
Setpoint, Common (-)
BLACK
10
2
Flow Signal, 0(1)-5 volt, Output (+)
WHITE
9
3
TTL Alarm, Open Collector, Output (+)
RED
2
4
Flow Signal, 0(4)-20 mA, Output (+)
GREEN
13
5
Power Supply, +13.5 Vdc to +27 Vdc (+)
ORANGE
N/A
6
Not Connected
N/A
3
7
Setpoint, 0(4)-20 mA, Input (+)
WHT/BLK
5
8
Setpoint, 0(1)-5 volt, Input (+)
RED/BLK
12
9
Power Supply, Common (-)
GRN/BLK
8
10
Flow Signal, Common, Output (-)
ORG/BLK
N/A
11
Reference, +5 Vdc, Output (+)
N/A
7
12
Valve Override, Input
BLK/WHT
N/A
13
Calibration Select, Input
N/A
N/A
14
RS-485, Common B (-)
N/A
N/A
15
RS-485, Common A (+)
N/A
* Brooks Read Out Models 0151, 0152, 0154, 0254