Brooks Instrument SLAMf Series - Manual (Page 13)

1-7
Section 1 - Introduction Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
Alarm Output (Analog I/O versions only)
The Alarm Output is an open collector or "contact" type that is CLOSED
(on) whenever an alarm is active. The Alarm Output may be set to indicate
any one of various alarm conditions. Reference Section 3-6-2 for more
information on alarms.
Type: Open Collector
Max Closed (ON) Current: 25 mA
Max Open (OFF) Leakage: 1
μA
Max Open (OFF) Voltage: 30 Vdc
Fast Response Performance
The curves in Figure 1-3 depict the MFC output signal and actual
transitional flow to steady-state when gas flow enters into process
chamber, under a step response command condition.
Brooks devices also feature adaptive (optimized) PID control, including fast
response. and linear ramp-up and/or ramp-down control characteristics.
Calibration Selection Signal (Analog I/O versions only)
Select one of ten gases and select PID tuning settings in analog mode.
Requires external connection of resistors between Pin # 13 and Pin # 9.
(Reference Tables 1-2 and 1-3.)
Selectable Soft Start
Processes requiring injection of gases can be adversely affected by
excessive initial gas flow. This abrupt injection of gas can result in process
damage from explosion or initial pressure impact. These problems are
virtually eliminated with the soft start feature.
Traditional soft start or linear ramp-up and/or ramp-down (See Figure 1-4)
can be factory selected or set by the user via special software.
Linear ramp-up is adjustable at 200% per second down to 0.5% per
second setpoint change.
(to be specified when ordering the device).
Figure 1-3 Response Performance of Brooks Digital MFC