Brooks Instrument SLAMf Series - Manual (Page 53)

4-5
Section 4 Maintenance &
Troubleshooting
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
Table 4-2 Troubleshooting
Trouble Possible cause Check/Corrective Action
Output stays at zero Clogged Sensor Clean sensor. Refer to cleaning procedures
(regardless of Setpoint) and (Section 4-1-2).
there is flow through the
meter/controller
Defective electronic board Contact Brooks Instrument
Flow cannot be achieved Clogged Control Valve Clean the control valve (Section 4-1-2) or
regardless of Setpoint. return the device to the factory
(applicable to MFC)
Valve override input is grounded Check the valve override input (Pin 12)
Defective electronic board Contact Brooks Instrument.
Output signal stays at approx. Valve leaks or is stuck open Clean and/or adjust control valve
5.5 Vdc or 22 mA (applicable to MFC) (Section 4-1-2).
(regardless of Setpoint) and
there is flow through the
+15 V applied to the valve Check the valve override terminal (Pin 12)
meter/controller override input
(applicable to MFC)
Defective PC board Contact Brooks Instrument
Output signal follows Setpoint Control valve leaks or is stuck Clean the control valve or return the device
at higher Setpoints but will not open. to the factory (Section 4-1-2).
go below 2%
Output signal follows Setpoint
Insufficient inlet pressure or Adjust pressures, inspect in-line filters and
at lower Setpoints, but does pressure drop clean/replace as necessary.
not reach full scale
Partially clogged sensor Clean sensor, see cleaning procedures
(Section 4-1-2).
Partially clogged valve Clean the control valve (Section 4-1-2) or
(applicable to MFC) return the device to the factory, see
cleaning procedures
Valve out of adjustment Contact Brooks Instrument
(applicable to MFC)
Valve guide spring failure Contact Brooks Instrument
(applicable to MFC)
Instrument grossly out of Partially clogged sensor Clean sensor, see cleaning procedures
calibration. Flow is higher than (Section 4-1-2).
desired.
Instrument grossly out of
Partially clogged restrictor Replace or clean restrictor
calibration. Flow is lower than
desired.
Controller oscillates
Pressure drop or inlet pressure Adjust pressures to original specifications
(applicable to MFC) deviates from calibrated values
Valve out of adjustment Contact Brooks Instrument
Unstable inlet pressure Check external pressure regulator
Defective PC board Contact Brooks Instrument