Brooks Instrument SLAMf Series - Manual (Page 37)

3-3
Section 3 Operation Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
3-4 Analog I/O Mode of Operation
The following paragraphs describe the basic features of the Brooks SLAMf
Digital Series Mass Flow Meters/Controllers.
NOTE: Read Section 3-3, Features, before reading this section. See
DeviceNet Supplemental Instruction Manual for specific details on
communication features.
Functional Description
The analog interface may include any of the following I/O options as
specified by the user:
0 - 5 Vdc setpoint, 0 - 5 Vdc flow output
1 - 5 Vdc setpoint, 1 - 5 Vdc flow Output
0 - 20 mA setpoint, 0 - 20 mA flow output
4 - 20 mA setpoint, 4 - 20 mA flow output
Also included are the Valve Override input and Calibration Select input
pins. All analog signals available are on the 15 pin D-Connector. (See Fig.
2-1 for connections). Note that one formerly unused connector pin, Pin 13,
now allows selection of up to ten separate calibrations. The contents of the
ten calibrations are determined from the customer order. Only those
calibrations ordered will be available in the instrument. Unless otherwise
specified, a Brooks SLAMf Digital MFC/MFM ordered with only one
calibration will have that calibration stored in calibration #1.
Before operating the MFC/MFM, apply power and warm-up the instrument
for approximately 45 minutes. After warm-up, apply gas pressure then
proceed by following the instructions in the following sections.
Analog I/O Setpoint (MFC Only)
This input allows the user to establish the MFC setpoint,. Several input
types are available as follows:
Analog I/O Flow Signal
This output is used to indicate the flow signal. A negative flow signal
indicates reverse flow through the device, but is NOT calibrated.
Setpoint Signal Type Full Scale Minimum Signal Maximum Signal
0 to 5 Vdc 5 Vdc 0 V 5.5 Vdc = 110%
1 to 5 Vdc 5 Vdc 1 V 5.5 Vdc = 111%
0 to 20 mA 20 mA 0 mA 22 mA = 110%
4 to 20 mA 20 mA 20 mA 22 mA = 111%
Analog I/O Type Full Scale Minimum Signal Maximum Signal
0 to 5 Vdc 5 Vdc -0.5 V 5.5 Vdc = 110%
1 to 5 Vdc 5 Vdc 0.5 V 5.5 Vdc = 111%
0 to 20 mA 20 mA 0 mA 22 mA = 110%
4 to 20 mA 20 mA 3.8 mA 22 mA = 111%