Brooks Instrument SLAMf Series - Manual (Page 19)

1-13
Section 1 - Introduction Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
Figure 1-7 Model SLAMf50F Digital I/O F OUNDATION Fieldbus MFC
Figure 1-6 Model SLAMf50D Digital I/O DeviceNet MFC