Brooks, Digital mfc's and mfm's – Brooks Instrument SLAMf Series User Manual
Page 14
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Section 1 - Introduction
Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks
®
Digital MFC's and MFM's
Figure 1-4 Linear Ramp-up and/or Ramp-down from 200% Per Second Down to
0.5 % Per Second Setpoint Change
DEFAULT = CAL# 1 (External resistor not installed)
CAL
Resistor Value (k ohms)
CAL
Resistor Value (k ohms)
1
Not Installed
6
124
2
Shorted
7
80.6
3
665
8
52.3
4
324
9
30.9
5
191
10
15
Table 1-3 Analog I/O Pin Connections:
Table 1-2 Calibration Select Signal
Function PIN
Setpoint, Common Input (-)
1
Flow Signal, 0(1) -5 volt, Output (+)
2
TTL Alarm, open collector, Output (+)
3
Flow Signal, 0(4)-20 mA, Output (+)
4
Power Supply, +13.5 Vdc to +27 Vdc(+)
5
Not Connected
6
Setpoint, 0(4)-20 mA, Input (+)
7
Setpoint, 0(1)-5 Vdc, Input (+)
8
Power Supply, Common (-)
9
Flow Signal, Common, Output, (-)
10
Reference, +5 Vdc, Output (+)
11
Valve Override, Input
12
Calibration Select Input
13
RS-485 Common B (-)
14
RS-485 Common A (+)
15