Brooks Instrument SLAMf Series - Manual (Page 22)

1-16
Section 1 - Introduction Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
Figure 1-13 Model SLAMf63 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)
Figure 1-12 Model SLAMf61 with Cable Gland (PG11, M20 x 1.5, 1/2" NPT)