Brooks Instrument SLAMf Series - Manual (Page 75)

Installation and Operation Manual
X-TMF-SLAMf-MFC-eng
Part Number: 541B032AAG
April, 2013
Brooks ® Digital MFC's and MFM's
TRADEMARKS
Brooks .......................................................... Brooks Instrument, LLC
Brooks Service Suite ................................... Brooks Instrument, LLC
Brooks Service Tool ..................................... Brooks Instrument, LLC
DeltaV ............................................................... Emerson Electric Co.
DeviceNet ...................... Open DeviceNet Vendors Association, Inc.
F
OUNDATION Fieldbus ......................................... Fieldbus F OUNDATION
HART ......................................... HART Communications Foundation
ITK ..................................................................... Fieldbus F
OUNDATION
Kalrez ............................................. DuPont Performance Elastomers
ODVA ............................. Open DeviceNet Vendors Association, Inc.
PlantWeb .......................................................... Emerson Electric Co.
Teflon ................................................. E.I. DuPont de Nemours & Co.
VCO ..................................................................................... Cajon Co.
VCR ..................................................................................... Cajon Co.
Viton ............................................... DuPont Performance Elastomers