INFICON T-Guard Leak Detection Sensor User Manual
Page 16
Advertising
14
Description
jina
85
e 3
.fm
Tech
ni
ca
l Ha
nd
bo
ok
(1
11
2)
When the T-Guard™ Leak Detection Sensor is not measuring at the moment or is
READY , V2 and V3 are open, V1 is closed (refer to
Fig. 4-6
). Only gas from the
reference inlet gets to the sensor.
Fig. 4-6 Valve position in READY mode.
Item
Description
Item
Description
1
Inlet “IN”
8
Pressure gauge p1
2
Reference “Ref”
9
Pump
3
Filter 2
10
Pump connector “OUT”
4
Valve V
3
11
Throttle 3
5
Valve V
2
12
Throttle 1
6
Throttle 2
13
Valve V
1
7
Wise Technology™ Sensor
14
Filter 1
Advertising