INFICON UHV Bakeable Sensor - Manual (Page 14)

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PN
07
4-
15
4N
UHV Bakeable Sensor Operating Manual
1.5.2 UHV Bakeable Sensor with Shutter (PN BK-A1F)
Maximum Temperature . . . . . . . . . . 400°C continuous bakeout
NOTE: Water flow recommended
for deposition.
Sensor Head Size
(maximum envelope) . . . . . . . . . . . . 34 x 35 x 31 mm
(1.35 x 1.38 x 1.21 in.)
Tubes
Water . . . . . . . . . . . . . . . . . . . . . 3.2 mm (0.125 in.) OD (vacuum side)
6.4 mm (0.25 in.) OD (atmosphere side)
Air . . . . . . . . . . . . . . . . . . . . . . . . 3.2 mm (0.125 in.) OD (vacuum side)
4.8 mm (0.188 in.) OD (atmosphere side)
Coax . . . . . . . . . . . . . . . . . . . . . . 4.8 mm (0.188 in.) OD
Crystal Exchange . . . . . . . . . . . . . . . Front loading, self-contained package,
cam-type locking handle
Mounting . . . . . . . . . . . . . . . . . . . . . Four #4-40 tapped holes
(on back of sensor body)
4.57 mm (0.18 in.) thread depth
Crystal
(not included with sensor) . . . . . . . . 14 mm (0.550 in.) diameter
1.5.3 Materials
Body and Holder . . . . . . . . . . . . . . . 304 stainless steel
Springs . . . . . . . . . . . . . . . . . . . . . . . Molybdenum and Inconel® X-750
Tubes . . . . . . . . . . . . . . . . . . . . . . . . Seamless 304 stainless steel
Other Mechanical Parts . . . . . . . . . . 18-8 or 304 stainless steel
Insulators . . . . . . . . . . . . . . . . . . . . . >99% Al
2
O
3
Wire . . . . . . . . . . . . . . . . . . . . . . . . . 1) Ni (in vacuum)
2) Ni plated Cu (atmosphere)
Braze . . . . . . . . . . . . . . . . . . . . . . . . Vacuum process high temperature
Ni-Cr alloy