1 tube bending – INFICON UHV Bakeable Sensor User Manual
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UHV Bakeable Sensor Operating Manual
2.3.1 Tube Bending
CAUTION
Read this entire section before attempting to
bend the tubes. Incorrect tube bending that
damages the tubes voids the warranty.
If it is necessary to bend the tubes to clear obstacles inside the chamber or to bring
the sensor head into a proper mounting location, observe the following precautions:
For bakeable sensors with clamps on the tubing, bend the tubing only between
the clamps, making sure the clamp screws are tight before bending the tubing.
For shorter bakeable sensors that do not include clamps, bend the tubing only
where the tubes are parallel and in contact with each other.
CAUTION
Do not bend near the sensor head. Stress in this area can
crack the ceramic feedthrough and cause loss of vacuum
integrity or short the wire providing crystal drive.
Always use a bending tool or form and support the tubes where the bends will
be placed to avoid a tube being collapsed or pinched.
If the water tube is collapsed or pinched, water flow will be restricted. The
sensor will not have sufficient cooling.
If the air tube is collapsed or pinched, air pressure will be restricted. The
shutter will not operate correctly.
If the coax tube is collapsed or pinched, the wire providing the crystal drive
can short.
CAUTION
Do not form the sensor tubes with a bend radius
less than 50.8 mm (2.0 in.) from the inside of the bend.
Water, air, and coax tubes are semi-rigid, but flexible enough to bend. They are not
designed for repeated bending. Plan bends wisely. Before the actual tube bending,
verify the bend position again to avoid readjusting. If in doubt, contact INFICON
support (refer to