INFICON UHV Bakeable Sensor - Manual (Page 49)

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UHV Bakeable Sensor Operating Manual
5.1.2.4 XIU Test Function
The XIU Test function is a feature of IC/5, Cygnus, IC6, Cygnus 2, and XTC/3
controllers. Refer to the controller operating manual for instructions on using
the XIU test function.
5.1.3 Digital Multimeter
A useful tool for diagnosing sensor problems is the Digital Multimeter (DMM).
To isolate the cause of a sensor problem, perform electrical isolation and continuity
checks, starting with the Electrical Isolation Check (
section 5.1.3.1 ).
5.1.3.1 Electrical Isolation Check
1 Remove the crystal holder from the bakeable sensor.
2 Disconnect the BNC cable from the bakeable sensor feedthrough.
3 Select the DMM ohmmeter function and a high megohm (M  ) resistance scale.
4 At the BNC connector on the feedthrough, measure the resistance between the
center contact and shield, as shown by
Figure 5-1 .
 If resistance is more than 10 M  , electrical isolation is good. Go to section
5.1.3.2, Electrical Continuity Check, on page 5-6 .
 If resistance is less than 10 M

, contact INFICON (refer to section 1.3 on
page 1-2 ).
Figure 5-1 BNC connector resistance