INFICON UHV Bakeable Sensor - Manual (Page 21)

2 - 1
PN
07
4-
15
4N
UHV Bakeable Sensor Operating Manual
Chapter 2
UHV Bakeable Sensor Installation
2.1 Pre-installation Sensor Check
Prior to installing the sensor in the vacuum system, make certain that it is in proper
working condition by following the appropriate procedure.
2.1.1 Sensor Check with XTC/3, IC6, or Cygnus 2
Deposition Controller
1 Connect one end of the 15.2 cm (6 in.) BNC cable (PN 755-257-G6)
to the BNC connector on the feedthrough.
2 Connect the other end of the 15.2 cm (6 in.) BNC cable
to the connector of the ModeLock oscillator (XIU) (PN 781-600-GX).
3 Connect one end of the XIU cable (PN 600-1261-PXX)
to the mating connector of the XIU.
4 Connect the other end of the XIU cable to a sensor channel
at the rear of the controller.
5 Install the crystal as instructed by section 4.2 on page 4-3 .
6 Connect power to the controller.
7 Set the power switch to ON.
8 Set density at 1.00 g/cm
3
.
9 Zero the thickness. The display should indicate 0 or ± 0.001 kÅ.
Crystal life should read from 0 to 5%.
10 Breathe heavily on the crystal. A thickness indication of 1.000 to 2.000 kÅ
should display. When the moisture evaporates, the thickness indication should
return to approximately zero. If these conditions are observed, the sensor is in
proper working order and may be installed (see
section 2.3 on page 2-7 ).