INFICON UHV Bakeable Sensor - Manual (Page 15)

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UHV Bakeable Sensor Operating Manual
1.5.4 Installation Requirements
Feedthrough . . . . . . . . . . . . . . . . . . . CF40 (2-3/4 in. ConFlat) feedthrough,
integral with sensor head
Other . . . . . . . . . . . . . . . . . . . . . . . . XIU or Oscillator to match specific
controller/monitor
BK-A1F only: Solenoid Valve for air,
PN 750-420-G1 (see
Chapter 3, Solenoid
Valve Assembly Installation )
Water Flow Rate. . . . . . . . . . . . . . . . Minimum water flow 150 to 200 cm 3 /min,
30°C maximum
NOTE: User should provide means of easily
disconnecting the 6.35 mm (1/4 in.)
water tubes during bakeout.
Water Quality . . . . . . . . . . . . . . . . . . Coolant should not contain chlorides as
stress corrosion cracking may occur.
Extremely dirty water may result in loss of
cooling capacity.
CAUTION
Do not allow water tubes to freeze. This may happen if the
tubes pass through a cryogenic shroud and the flow of
fluid is interrupted.
Air (BK-A1F only) . . . . . . . . . . . . . . . 70 psi (gauge) {85 psi (absolute)}
(5.8 bar (absolute)) [584 kPa (absolute)]
(minimum)
80 psi (gauge) {95 psi (absolute)}
(6.5 bar (absolute)) [653 kPa (absolute)]
(maximum)
WARNING
Do not exceed 100 psi (gauge) {115 psi (absolute)}
(7.9 bar (absolute)) [791 kPa (absolute)].
Connection to excessive pressure may result in personal
injury or equipment damage.