3 sensor installation procedure, Alled (see – INFICON UHV Bakeable Sensor User Manual
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UHV Bakeable Sensor Operating Manual
In many cases installing multiple sensors to monitor one source can improve
thickness accuracy. The rules for multiple sensors are the same as for a single
sensor installation, and the locations chosen must be as defined above. Consult
the monitor or controller manual for more information regarding the availability of
this feature.
NOTE: A technical description may be found in the 39th Annual Conference
Proceedings, Society of Vacuum Coaters, Reducing Process Variation
Through Multiple Point Crystal Sensor Monitoring, J. Kushneir, C. Gogol,
J. Blaise, pp19-23, ISSN 0737-5921 (1996).
2.3 Sensor Installation Procedure
CAUTION
The UHV Bakeable Sensor should be clean and free of
grease when installed in the vacuum chamber. Clean
nylon gloves should be worn while handling.
If parts do become contaminated, clean them thoroughly
using a suitable solvent to avoid outgassing.
1
A mounting bracket (user provided) is recommended to prevent movement of
the sensor head during maintenance or crystal replacement. Assemble the
sensor mounting bracket (user provided) on the process system.
NOTE: Four #4-40 thread holes are provided on the back of the sensor head
for attaching the bakeable sensor to the mounting bracket.
2
If the sensor tubing needs to be bent to achieve the desired position of the
sensor head, see
section 2.3.1, Tube Bending, on page 2-9
3
Connect the sensor feedthrough to the mating flange on the vacuum chamber.
4
Connect the sensor head to the mounting bracket, using #4-40 screws and the
mounting holes provided on the back of the sensor head.
NOTE: Mounting hole thread depth is 4.57 mm (0.18 in.)
5
Connect the external water tubes from the feedthrough to the water supply
system and flow controller. Use detachable couples (Swagelok® or equivalent)
for external water tube connections.
6
Apply water at the specified flow rate (refer to
), and verify that the water connections are tight.