Figure 2-1 – INFICON UHV Bakeable Sensor User Manual

Page 25

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2 - 5

PN

07

4-

15

4N

UHV Bakeable Sensor Operating Manual

Figure 2-1 Typical UHV Bakeable Sensor installation

>

Mounting Bracket

Coax Tube

Weld Joint

Source

to

Sensor

25.4 cm

(10 in.)

Minimum

Sensor

Shutter

Source

Pneumatic

Actuator

PN 750-420-G1

Solenoid

Valve

Instrument Chassis

To

Source Controller

To
Instrument
Chassis

Water In

Water Out

Air Supply

Source

Shutter

XIU (Oscillator)

VCR

Fitting

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