Figure 2-1 – INFICON UHV Bakeable Sensor User Manual
Page 25
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2 - 5
PN
07
4-
15
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UHV Bakeable Sensor Operating Manual
Figure 2-1 Typical UHV Bakeable Sensor installation
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Mounting Bracket
Coax Tube
Weld Joint
Source
to
Sensor
25.4 cm
(10 in.)
Minimum
Sensor
Shutter
Source
Pneumatic
Actuator
PN 750-420-G1
Solenoid
Valve
Instrument Chassis
To
Source Controller
To
Instrument
Chassis
Water In
Water Out
Air Supply
Source
Shutter
XIU (Oscillator)
VCR
Fitting
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