RKI Instruments GD-K71D - Manual (Page 45)

PT2E-1052
44
Detection gas
Chemical
formula Detection
range Preset
alarm level
(standard) Applicable
filter
Ammonia NH3 0∼75 ppm 25 ppm M
Antimony
Pentachloride SbCl5 HCl 0∼15 ppm 5 ppm M
Arsenic
Pentachloride AsCl5 HCl 0∼15 ppm 5 ppm M
Arsenic
Pentafluoride AsF5 HF 0∼9 ppm 3 ppm M
Arsenic Trichloride AsCl3 HCl 0∼15
ppm 5 ppm M
Arsenic Trifluoride AsF3 HF 0∼9 ppm 3 ppm M
Arsine AsH3 0∼0.2 ppm 0.05 ppm M.B
Boron Tribromide BBr3 HBr 0∼9
ppm 3 ppm M
Boron Trichloride BCl3 HCl 0∼15 ppm 5 ppm M
Boron Trifluoride BF3 HF 0∼9 ppm 3 ppm M
Bromine Br2 0∼1 ppm 0.2 ppm M
Chlorine Cl2 0∼1.5 ppm 0.5 ppm M.B
0∼1 ppm 0.2 ppm M Chlorine Trifluoride CIF3
0∼0.6 ppm 0.1 ppm M
Diborane B2H6 0∼0.3 ppm 0.1 ppm M
Dichlorosilane SiH2Cl2 HCl 0∼15 ppm 5 ppm M
Disilane Si2H6 0∼15 ppm 5 ppm M.B
Fluorine F2 0∼3 ppm 1 ppm M
Germane GeH4 0∼0.8 ppm 0.2 ppm M.B
Germanium
Tetrachloride GeCl4 HCl 0∼15 ppm 5 ppm M
Hydrogen Bromide HBr 0∼9 ppm 3 ppm M
Hydrogen Chloride HCl 0∼15 ppm 5 ppm M
Hydrogen Fluoride HF 0∼9 ppm 3 ppm M
Hydrogen Iodine Hl 0∼5 ppm 2 ppm M
Hydrogen Selenide H2Se 0∼0.2 ppm 0.05 ppm M.B
Iodine I2 0∼1 ppm 0.3 ppm M
Molybdenum
Pentachloride MOCl5 HCl 0∼15
ppm 5 ppm M
Molybdenum
Hexafluoride MOF6 HF 0∼9 ppm 3 ppm M
Nitrogen Dioxide NO2
0∼15 ppm
5 ppm M.B
0∼1 ppm 0.3 ppm M Ozone O3
0∼0.6 ppm 0.1 ppm M
Phosphine PH3 0∼1 ppm 0.3 ppm M.B
Phosphorus
Oxychloride POCl3 HCl 0∼15
ppm 5 ppm M
Phosphorus
Pentachloride PCl5 HCl 0∼15 ppm 5 ppm M
Phosphorus
Pentafluoride PF5 HF 0∼9
ppm 3 ppm M
TYPICAL DETECTION GASES AND APPLICABLE FILTERS(EXAMPLE)