RKI Instruments GD-K71D - Manual (Page 46)

PT2E-1052
45
Detection gas
Chemical
formula Detection
range
Preset
alarm level
(standard)
Applicable
filter
Phosphorus
Trichloride PCl3 HCl 0∼15 ppm 5 ppm M
Phosphorus
Trifluoride PF3 0∼10 ppm 2 ppm M
Silane SiH4 0∼15 ppm 5 ppm M.B
Silicone
Tetrachloride SiCl4 HCl 0∼15 ppm 5 ppm M
Silicone
Tetrafluoride SiF4 HF 0∼9
ppm 3 ppm M
Sulfur Tetrafluoride SF4 HF 0∼9
ppm 3 ppm M
Tantalum Fluoride TaF5 HF 0∼9 ppm 3 ppm M
Tin Tetrachloride SnCl4 HCl 0∼15
ppm 5 ppm M
Trichlorosilane SiHCl3 HCl 0∼15 ppm 5 ppm M
Tungsten
Hexachloride WCl6 HCl 0∼15 ppm 5 ppm M
Tungsten
Hexafluoride WF6 HF 0∼9
ppm 3 ppm M
*For gases not listed above, contact us or our nearest agent.
*M : Millipore type filter B : Balston type filter
*Gases which have “HCL(HF)” in the box of detection range are
hydrized by moisture in air, and detected by becoming HCL(HF).