INFICON T3000 Thermal Power Supply - Manual (Page 8)

instruments Thermal Power Supply T3000
Section 1 Page 1 - 1 Introduction – Description
of Equipment
Section 1
Introduction – Description of Equipment
1.1 Purpose and Capabilities
The Sycon T3000 is designed specifically to power resistive evaporative sources used in
the deposition of thin film coatings. It has been specified to cover the class of resistive load
devices requiring low voltage and high current at power levels up to 3kW. The two output
sections of the supply can be connected in parallel to provide up to 600 Amperes RMS in
excess of 5 Volts, or in the series connected configuration, 300 Amperes RMS in excess of
10 Volts. This versatile output range covers a broad spectrum of thermal sources. T3000
power supplies can be connected in parallel to meet extremely high power requirements,
(two units connected in parallel would provide up to 6kW load power.)
Several methods for controlling output power are available to the user. In the simplest
arrangement, a user-supplied DC voltage is applied to control the output current to the
load. A current feedback loop in the T3000 serves to stabilize output load current in
proportion to this DC control voltage input.
The next level of sophistication is to use the T3000 in conjunction with the Sycon RS3000
controller. This unit allows the user to input desired current levels with corresponding rate
of rise times to control load thermal stresses and to monitor set points and output power
levels. The controller features automatic shutdown to govern over-temperature and open-
load failure modes.
The T3000 is also directly compatible for use with industry standard thickness/rate
controllers, such as the Sycon STC-200 or STC-2000 products. This configuration allows
setting of specified deposition rates through automatic control of output power to the
thermal source. STC PID control loop features govern deposition dynamics for these
applications.
The most sophisticated configuration employs the T3000 with the RS3000 and STC-200 or
STC-2000 products. This configuration allows setting of specified deposition rates through
automatic control of output power to the thermal source, control of PID loop dynamics and
provides set points and output power level as well as other monitoring and control
functions.
1.2 Theory of Operation
The T3000 is a switch mode power supply (SMPS), which operates at a switching
frequency of 250kHz. High frequency operation allows significant reduction in the size and
weight of the magnetic components while maintaining high operating efficiency.
The SMPS converts 208/220 VAC single-phase line voltage to a line-isolated full-wave
rectified 120-Hertz output waveform, which provides up to 3kW output power. Please note
that the RMS value of a full-wave rectified sine wave is the same as that of the sine wave,