INFICON SKY CDG025D-X3 0.1 ... 1000 Torr / mbar process gauge User Manual
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tina57e1 (2010-01)
Current consumption
<500 mA
(max. starting current)
Power consumption
(depending on supply voltage)
≤1 W
Fuse required
2)
1 AT (slow), automatic reset
(Polyfuse)
The gauge is protected against reverse polarity of the supply
voltage.
Electrical connection
15-pin D-Sub, male
Sensor cable
without switching functions
with switching functions
5-pin plus shielding
9-pin plus shielding
Cable length
≤100 m (0.14 mm² conductor)
For longer cables, larger conductor cross-sections are required
(R
cable
≤
1.0
Ω).
Grounding concept
Vacuum flange - signal common
→ "Electrical Connection"
Supply common - signal common conducted separately; for dif-
ferential measurement (10
Ω)
Materials exposed to vacuum
Flange, tube
Sensor and diaphragm
stainless steel AISI 316L
ceramics (Al
2
O
3
≥99.5%)
Internal volume
≤3.6 cm
3
Admissible pressure (absolute)
≥200 Torr/mbar (F.S.)
1 … 100 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
3 bar
2 bar
1.3 bar
Bursting pressure (absolute)
5 bar