INFICON SKY CDG025D-X3 0.1 ... 1000 Torr / mbar process gauge User Manual
Page 28
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28
tina57e1 (2010-01)
Caution
Caution: dirt sensitive area
Touching the product or parts thereof with bare
hands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.
Vent the vacuum system.
But the gauge out of operation.
Unfasten the lock screws and disconnect the sensor cable.
Remove the gauge from the vacuum system and install the
protective lid.
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