INFICON SKY CDG025D-X3 0.1 ... 1000 Torr / mbar process gauge - Manual (Page 8)

8 tina57e1 (2010-01)
2 Technical Data
Measurement range → "Validity"
Accuracy
1)
≥1 Torr/mbar (F.S.)
0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)
0.20% of reading
0.25% of reading
0.50% of reading
Temperature effect on zero
≥10 Torr/mbar (F.S.)
1 / 2 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
0.0050% F.S./ °C
0.015% F.S./ °C
0.020% F.S./ °C
Temperature effect on span
≥1 Torr/mbar (F.S.)
0.1 / 0.25 Torr/mbar (F.S.)
0.01% of reading / °C
0.03% of reading / °C
Resolution 0.003% F.S.
Gas type dependence none
Output signal analog
(measuring signal)
Voltage range –5 … +10.24 V
Measuring range 0 … +10 V
Relationship voltage-pressure linear
Output impedance 0 Ω (short-circuit proof)
Loaded impedance >10 k Ω
Response time
≥0.25 Torr/mbar (F.S.)
0.1 Torr/mbar (F.S.)
30 ms
130 ms
Gauge identification Resistance 13.2 k Ω refer-
enced to supply common
(Voltage at pin 10
≤5 V)
1)
Non-linearity, hysteresis, repeatability in the calibrated range at 25 °C
ambient operating temperature without temperature effects after
operation of 2 h.