1 < zero > adjustment – INFICON SKY CDG025D-X3 0.1 ... 1000 Torr / mbar process gauge User Manual
Page 20
20
tina57e1 (2010-01)
4.2.1
<ZERO> Adjustment
The zero can be adjusted via
• the <ZERO> button on the gauge,
• the RS232C interface (→ [4]),
• an INFICON Vacuum Gauge Controller (VGC series).
Evacuate the gauge to a pressure according to the table
below:
F.S.
Recommended final pressure for
zero adjustment
1100 mbar
1000 Torr/mbar
200 Torr/mbar
100 Torr/mbar
20 Torr/mbar
10 Torr/mbar
2
Torr/mbar
1
Torr/mbar
0.25 Torr/mbar
0.1 Torr/mbar
−
<5
×10
-2
Torr
<10
-2
Torr
<5
×10
-3
Torr
<10
-3
Torr
<5
×10
-4
Torr
<10
-4
Torr
<5
×10
-5
Torr
<10
-5
Torr
<5
×10
-6
Torr
<6.65
×10
0
Pa
<6.65
×10
0
Pa
<1.33
×10
-0
Pa
<6.65
×10
-1
Pa
<1.33
×10
-1
Pa
<6.65
×10
-2
Pa
<1.33
×10
-2
Pa
<6.65
×10
-3
Pa
<1.33
×10
-3
Pa
<6.65
×10
-4
Pa
<5
×10
-2
mbar
<5
×10
-2
mbar
<10
-2
mbar
<5
×10
-3
mbar
<10
-3
mbar
<5
×10
-4
mbar
<10
-4
mbar
<5
×10
-5
mbar
<10
-5
mbar
<5
×10
-6
mbar
If the final pressure in the gauge is too high for zero ad-
justment (>25% of the F.S.), the zero cannot be reached
and the <RUN> LED flashes. If this is the case, activate
the factory setting and adjust the zero again (
→ 26).
Operate the gauge for at least 15 minutes (until the signal
is stable).