INFICON SKY CDG025D-X3 0.1 ... 1000 Torr / mbar process gauge - Manual (Page 4)

4 tina57e1 (2010-01)
Intended Use
The Capacitance Diaphragm Gauges of the CDG025D X3 series
are intended for absolute pressure measurement of gases in
their respective pressure ranges (
→ 3). They are clean room
compliant and double protected against contamination.
The gauges belong to the SKY
®
Smart Sensors family and can
be operated in connection with an INFICON Vacuum Gauge
Controller (VGC series) or another appropriate measuring unit.
Function
The Capacitance Diaphragm Gauge consists of a capacitive
sensor element made of aluminum oxide ceramics and electro-
nics which convert the capacitance into a DC voltage output sig-
nal.
The output signal is linear to the measured pressure and inde-
pendent of the gas type.
Trademarks
SKY
®
INFICON GmbH
VCR ® Swagelok Marketing Co.
Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085
Scope of Delivery
1× gauge in clean room packaging
1× pin for adjusting settings via buttons
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English