Brooks Instrument GF81 - Manual (Page 11)

1-5
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Section 1 Introduction
1-10 Description
Control
The GF40/GF80/GF81 Series brings together Brooks high-performance,
patented ultra-fast T-rise flow sensor, high-speed ARM based digital
architecture, and a fast-acting diaphragm-free solenoid valve to deliver:
• Fast reproducible transitions between setpoints without overshoot or
ringing
• User-programmable ramp functions for processes requiring a slow-
ramp in flow or time critical transitions
• Optional bubble tight shut down (elastomer valve seat)
MultiFlo™ Gas and Range Configurability
The Brooks MultiFlo technology delivers exceptional improvement in
process gas accuracy for linear and non-linear gases. This is achieved
through advanced gas modeling and optimized through actual gas testing.
Brooks MultiFlo
TM allows the device to be quickly and easily configured for
another gas and/or flow range without sacrificing accuracy or rangability.
Selecting a new gas automatically creates a new calibration curve,
establishes optimized PID settings for dynamic control, automatically
compensates for gas density effects, and ensures smooth overshoot-free
transitions between flow rates with excellent steady-state stability. Brooks
MultiFlo technology offers unparalleled flexibility. An extensive gas
database is provided and a single device can be quickly programmed for
thousands of different gas and flow range combinations. Process benefits
achieved include:
• Mass flow controller full scale full range can be rescaled down typically
by a factor of 3:1 with no impact on accuracy, turndown or leak by
specifications
• Optimum process and inventory flexibility resulting in dramatically
reduced inventory costs
• Fewer configurations/bin sizes required to support many different
processes
• Less down-time with rapid process recovery
MultiFlo TM Support References: Brooks MultiFlow Configurator Quick
Start Guide (X-SW-MultiFlo-Config-QS-eng (Part Number: 541B167AAG))
MultiFlo TM Configurator Accessory Kits:
778Z010ZZZ Basic MultiFlo Configurator Kit
*Software, MultiFlo Configurator
A331710003 Cable Assembly 2.5mm
A332300001 Converter 232/485