Brooks Instrument GF81 - Manual (Page 8)

1-2
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Section 1 Introduction
1-3 Product Support References
Refer to www.BrooksInstrument.com for Brooks sales and service
locations and to obtain other documents that support the GF40/GF80/
GF81 Series. Those documents include:
• Brooks MultiFlo TM Configurator Quick Start Manual
(X-SW-MultiFlo-Config-QS-eng; part number 541B167AAG)
• Brooks GF40/GF80 Series data sheet (DS-TMF-GF40-GF80-MFC)
• Brooks GF81 Series data sheet (DS-TMF-GF81-MFC)
• DeviceNet TM Supplemental Manual for GF40/GF80/GF81 Series Mass
Flow Controllers and Meters
(X-DPT-DeviceNet-GF40-GF80-MFC-eng; part number 541B168AAG)
• Profibus ® Supplemental Manual for Brooks ® GF40/GF80/GF81 Series
Mass Flow Controllers and Meters
(X-DPT-Profibus-GF40-GF80-MFC-eng; part number 541B162AAG)
• RS485 Supplemental Manual for GF40/GF80/GF81 Series Mass Flow
Controllers and Meters
(X-DPT-RS485-GF40-GF80-MFC-eng; part number 541B169AAG)
• EtherCAT Supplemental Manual for Brooks ® GF40/GF80 Series Mass
Flow Controllers and Meters
(X-DPT-EtherCAT-GF40-GF80-MFC-eng; part number 541B170AAG)
1-4 Warning, Caution and Notice Statements
Warning, caution and notice statements are located throughout this manual
in the ANSI format. A WARNING statement indicates a potentially
hazardous situation which, if not avoided, COULD result in death or serious
injury. A CAUTION statement indicates a potentially hazardous situation
which, if not avoided, MAY result in minor or moderate injury. It may also be
used to alert against unsafe practices. A NOTICE statement describes
specific information that requires special attention.
1-5 Product Warranty
Product warranty information can be found on the Back Cover of this
Manual and on the Brooks website at www.BrooksInstrument.com. This
information provides general warranty information, limitations, disclaimers,
and applicable warranty periods according to product group.
1-6 How to Order a GF40/GF80 Series Device
Refer to Section 5.