Brooks – Brooks Instrument GF81 User Manual
Page 14
1-8
Brooks
®
GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Section 1 Introduction
Table 1-3 Specifications for Standard GF40/GF80 Series
See Tables 1-3 thru 1-5 for specifications for the GF40/GF80/GF81 Series.
See Figures 1-2 thru 1-5 for dimensions for the GF40/GF80/GF81 Series.
GF40
GF40
GF40
GF40
GF40
GF80
GF80
GF80
GF80
GF80
PPPPPerformance
erformance
erformance
erformance
erformance
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
Full Scale Flow Range (N
22222
Eq.)
Eq.)
Eq.)
Eq.)
Eq.)
3 sccm to 50 slm
Flow
Flow
Flow
Flow
Flow Accur
Accur
Accur
Accur
Accuracy
acy
acy
acy
acy
+1% S.P. 35-100%, +0.35% F.S. 2-35%
Repeatability & Repr
Repeatability & Repr
Repeatability & Repr
Repeatability & Repr
Repeatability & Reproducibility
oducibility
oducibility
oducibility
oducibility
< + 0.2% S.P.
Linearity
Linearity
Linearity
Linearity
Linearity
+ 0.5% F.S. (included in accuracy)
Response
Response
Response
Response
Response Time (Settling
Time (Settling
Time (Settling
Time (Settling
Time (Settling Time)
Time)
Time)
Time)
Time)
Normally Closed Valve < 1 sec. (within 2% for steps 0-10 through 0-100%)
Normally Open Valve < 3 sec (within 2% for steps 0-10 through 0-100%)
Con
Con
Con
Con
Contr
tr
tr
tr
trol Range
ol Range
ol Range
ol Range
ol Range
2-100%
MultiFlo
MultiFlo
MultiFlo
MultiFlo
MultiFlo
optional
Number of Bins
Number of Bins
Number of Bins
Number of Bins
Number of Bins
10 bins
VVVVValve Shut Down
alve Shut Down
alve Shut Down
alve Shut Down
alve Shut Down
< 1% of F.S.
ZZZZZer
er
er
er
ero Stability
o Stability
o Stability
o Stability
o Stability
< + 0.5% F.S. per year
Pr
Pr
Pr
Pr
Pressur
essur
essur
essur
essure Coefficien
e Coefficien
e Coefficien
e Coefficien
e Coefficienttttt
0.03% per psi (0-50psi N
2
)
AAAAAttitude Sensitivity
ttitude Sensitivity
ttitude Sensitivity
ttitude Sensitivity
ttitude Sensitivity
<0.25% span change @ 90
O
after rezeroing (N
2
@ 50 psi)
Auto Z
Auto Z
Auto Z
Auto Z
Auto Zer
er
er
er
ero:
o:
o:
o:
o:
Optional: (When Auto Zero is enabled the device performs the zero function once every time the set point returns to
zero. To accomplish, simply provide a zero set point.)
Auto shut-off:
Auto shut-off:
Auto shut-off:
Auto shut-off:
Auto shut-off:
The Auto Shut-off feature closes the GF0xx valve when the set point drops below 1.5% of full scale
Ratings
Ratings
Ratings
Ratings
Ratings
Oper
Oper
Oper
Oper
Operating
ating
ating
ating
ating TTTTTemper
emper
emper
emper
emperatur
atur
atur
atur
ature Range
e Range
e Range
e Range
e Range
5-50
O
C (41-122
O
F)
Maximum Oper
Maximum Oper
Maximum Oper
Maximum Oper
Maximum Operating Pr
ating Pr
ating Pr
ating Pr
ating Pressur
essur
essur
essur
essureeeee
150 psig (10 bar)
Differ
Differ
Differ
Differ
Differen
en
en
en
ential Pr
tial Pr
tial Pr
tial Pr
tial Pressur
essur
essur
essur
essure Range
e Range
e Range
e Range
e Range 3-860 sccm = 7-45 psid, 861-7200 sccm = 15-45 psid, 7201-50000 sccm = 25-45 psid
Typical pressure drop, high density gases like Argon gas applications require an additional 10 psid differential pressure
Leak In
Leak In
Leak In
Leak In
Leak Integrity (External)
tegrity (External)
tegrity (External)
tegrity (External)
tegrity (External)
1x10
-9
atm. cc/sec He
1x10
-10
atm. cc/sec He
Mec
Mec
Mec
Mec
Mechanical
hanical
hanical
hanical
hanical
VVVVValve
alve
alve
alve
alve TTTTType
ype
ype
ype
ype
Normally Closed, Normally Open, No Valve (Meter)
Normally Closed, No Valve (Meter)
Primary
Primary
Primary
Primary
Primary W
W
W
W
Wetted Materials
etted Materials
etted Materials
etted Materials
etted Materials
316 Stainless Steel, Hastelloy C-22, 17-7 PH, 430SS
External Seals
External Seals
External Seals
External Seals
External Seals
Viton, Buna, Kalrez, EPDM or Neoprene
Metal/Nickel
In
In
In
In
Internal Seals/V
ternal Seals/V
ternal Seals/V
ternal Seals/V
ternal Seals/Valve Seat
alve Seat
alve Seat
alve Seat
alve Seat
Viton, Buna, Kalrez, EPDM or Neoprene
PFA/Kalrez
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Diagnostics & Display
Status Lights:
Status Lights:
Status Lights:
Status Lights:
Status Lights:
MFC Health, Network Status
Alarms*:
Alarms*:
Alarms*:
Alarms*:
Alarms*:
Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic / Service P
Diagnostic / Service P
Diagnostic / Service P
Diagnostic / Service P
Diagnostic / Service Port:
ort:
ort:
ort:
ort:
RS485 via 2.5mm jack
Compliance
Compliance
Compliance
Compliance
Compliance
En
En
En
En
Envir
vir
vir
vir
vironmen
onmen
onmen
onmen
onmental Compliance:
tal Compliance:
tal Compliance:
tal Compliance:
tal Compliance:
CE: EN61326: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
RoHS
General, Leak-Test Traceability, Oxygen Cleaning, Calibration Traceability, Material Certification
*Alarm modes are dependant on the communications interface. These are described in the corresponding digital communication interface manual.