Brooks Instrument GF81 - Manual (Page 26)

2-6
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013
Section 2 Installation
2-12 Position and Mount the GF40/GF80/GF81 Series
It is recommended that the MFC is re-zeroed with process gas following the
recommended Brooks procedure (see zeroing bulletin FSB-001-0015 for
futher information).
If your GF80 Series is configured with downported fittings, follow Steps 1
through 4 below. If your GF40/GF80/GF81 Series has in-line fittings (UNF,
RC, VCR, VCO, NPT, or tube compression), proceed to Step 5.
1. Refer to Figure 2-2. If downported fittings (1) are used, the GF80 Series
is mounted to K1 Series substrate blocks (2) with four screws (3). Metal
C-seals (4) (as provided by integrator) are inserted between the GF80
Series and substrate blocks before the screws are installed. These metal
seals must be replaced after each installation.
2. Select the mounting screws for downported devices. M4 screws are
used on 1.125" devices, K1S.
3. Refer to Figure 2-2. Insert the two mounting seals (4) over the gas flow
path of the K1 block. Carefully align the GF80 Series mounting holes
onto the K1 substrate blocks. Using your fingers, install the screws
through the GF80 Series fitting and hand tighten.
4. Using a torque wrench and a metric hex key, tighten the screws to the
torque value as described in Table 2-1 and the Torque Pattern in Figure
2-3.
5. If your GF40/GF80/GF81 Series is configured with in-line fittings,
secure the GF40/GF80/GF81 Series block to the gas panel with two, 8-
32-UNC-2B" screws. Then connect the inlet/ outlet fittings to the gas
supply line using two wrenches. Tighten the fittings to manufacturer
recommendations.