Brooks Instrument GF81 - Manual (Page 15)

1-9
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Section 1 Introduction
Table 1-4 Specifications for Standard GF81 Series
*Alarm modes are dependant on the communications interface. These are described in the corresponding digital communication interface manual.
GF81 GF81 GF81 GF81 GF81
* Note: Application specific lower supply pressure and/or lower differential pressure operation available through Brooks Customer Special Request (CSR) process.
PPPPPerformance erformance erformance erformance erformance
Standar Standar Standar Standar Standard Con d Con d Con d Con d Configur figur figur figur figuration Full Scale ation Full Scale ation Full Scale ation Full Scale ation Full Scale
Flow Range (N Flow Range (N Flow Range (N Flow Range (N Flow Range (N
22222
equivlen equivlen equivlen equivlen equivlent) t) t) t) t) 51 - 300 slm
Flow Flow Flow Flow Flow Accur Accur Accur Accur Accuracy acy acy acy acy 35-100% = 1% S.P., 2-35% = 0.35% F.S.
Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Repr Repeatability & Reproducibility oducibility oducibility oducibility oducibility 0.15% S.P.
Linearity Linearity Linearity Linearity Linearity + 0.5% F.S. (included in accuracy)
Response Response Response Response Response Time (Settling Time (Settling Time (Settling Time (Settling Time (Settling Time) Time) Time) Time) Time) < 1 second
Con Con Con Con Contr tr tr tr trol Range ol Range ol Range ol Range ol Range 5% - 100%
VVVVValve Shut Down alve Shut Down alve Shut Down alve Shut Down alve Shut Down <2% of Standard Configuration F.S. @ 30 N
2
psig/atm out
ZZZZZer er er er ero Stability o Stability o Stability o Stability o Stability <±0.5% F.S. per year
Pr Pr Pr Pr Pressur essur essur essur essure Coefficien e Coefficien e Coefficien e Coefficien e Coefficienttttt 0.03% per psi (0-50psi N
2
)
AAAAAttitude Sensitivity ttitude Sensitivity ttitude Sensitivity ttitude Sensitivity ttitude Sensitivity <0.25% span change @ 90 O after rezeroing (N
2
@ 50 psi)
Auto Z Auto Z Auto Z Auto Z Auto Zer er er er ero: o: o: o: o: Optional: When Auto Zero is enabled the device performs the zero function once every time the set point returns to
zero. To accomplish. simply provide a zero set point.
Auto Shut-off: Auto Shut-off: Auto Shut-off: Auto Shut-off: Auto Shut-off: The Auto Shut-off feature closes the GF81 valve when the set point drops below 2% of full scale.
AAAAAvailable Gases: vailable Gases: vailable Gases: vailable Gases: vailable Gases: N
2
, H
2
, Ar, He, O
2
, NH
3
(consult factory for other gases)
Ratings Ratings Ratings Ratings Ratings
Oper Oper Oper Oper Operating ating ating ating ating TTTTTemper emper emper emper emperatur atur atur atur ature Range e Range e Range e Range e Range 5-50 O C (41-122 O F)
Maximum Oper Maximum Oper Maximum Oper Maximum Oper Maximum Operating Pr ating Pr ating Pr ating Pr ating Pressur essur essur essur essure* e* e* e* e* Controller: 75 psig (5 bar) / Meter: 150 psig (10 bar)
Differ Differ Differ Differ Differen en en en ential Pr tial Pr tial Pr tial Pr tial Pressur essur essur essur essure Range* e Range* e Range* e Range* e Range* 30 - 90 psid
Leak In Leak In Leak In Leak In Leak Integrity (External) tegrity (External) tegrity (External) tegrity (External) tegrity (External) Metal Seal 1 x 10 -10 atm cc/sec He
Mec Mec Mec Mec Mechanical hanical hanical hanical hanical
VVVVValve alve alve alve alve TTTTType ype ype ype ype Normally Closed, Meter
Primary Primary Primary Primary Primary W W W W Wetted Materials etted Materials etted Materials etted Materials etted Materials 316 Stainless Steel, Hastelloy C-22, KM45
External Seals External Seals External Seals External Seals External Seals 316 Stainless Steel
In In In In Internal Seals/V ternal Seals/V ternal Seals/V ternal Seals/V ternal Seals/Valve Seat alve Seat alve Seat alve Seat alve Seat 316 Stainless Steel
Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display Diagnostics & Display
Status Lights: Status Lights: Status Lights: Status Lights: Status Lights: MFC Health, Network Status
Alarms*: Alarms*: Alarms*: Alarms*: Alarms*: Sensor Output, Control Valve Output, Over Temperature, Power Surge/Sag, Network Interruption
Diagnostic / Service P Diagnostic / Service P Diagnostic / Service P Diagnostic / Service P Diagnostic / Service Port: ort: ort: ort: ort: RS485 via 2.5mm jack
Compliance Compliance Compliance Compliance Compliance
En En En En Envir vir vir vir vironmen onmen onmen onmen onmental Compliance: tal Compliance: tal Compliance: tal Compliance: tal Compliance: CE: EN6126: 2006 (FCC Part 15 & Canada IC-subset of CE testing)
Safety EN61010-1
RoHS