Brooks Instrument GF81 - Manual (Page 5)

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Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Contents
Paragraph Page
Number Number
Section 1 Introduction
1-1 Introduction ................................................................................................................................... 1-1
1-2 How to Use This Manual ................................................................................................................ 1-1
1-3 Product Support References ......................................................................................................... 1-2
1-4 Warning, Caution and Notice Statements ...................................................................................... 1-2
1-5 Product Warranty .......................................................................................................................... 1-2
1-6 How to Order a GF40/GF80 Series Device .................................................................................... 1-2
1-7 Industry Standard References ....................................................................................................... 1-2
1-8 GF40/GF80/GF81 Series Gas Table .............................................................................................. 1-3
1-9 Glossary of Terms and Acronyms .................................................................................................. 1-3
1-10 Description .................................................................................................................................... 1-5
1-11 Specifications for GF40/GF80/GF81 Series Devices .................................................................... 1-7
Section 2 Installation
2-1 General .......................................................................................................................................... 2-1
2-2 Receipt of Equipment .................................................................................................................... 2-1
2-3 Recommended Storage Practice ................................................................................................... 2-2
2-4 Return Shipment ............................................................................................................................ 2-2
2-5 Transit Precautions ........................................................................................................................ 2-2
2-6 Removal from Storage ................................................................................................................... 2-2
2-7 Gas Connections ........................................................................................................................... 2-3
2-8 In-Line Filter .................................................................................................................................. 2-3
2-9 Mechanical Installation .................................................................................................................. 2-3
2-10 Flow Controller Installation Arrangement ........................................................................................ 2-4
2-11 Purge the Gas Supply Line Before GF40/GF80/GF81 Series Installation ...................................... 2-5
2-12 Position and Mount the GF40/GF80/GF81 Series .......................................................................... 2-6
2-13 Perform a Leak Test ...................................................................................................................... 2-8
2-14 Performance Checks ..................................................................................................................... 2-8
2-15 Zeroing Setup Process .................................................................................................................. 2-8
2-16 Zeroing the GF40/GF80/GF81 Series ............................................................................................ 2-9
2-17 Auto Shut-Off ................................................................................................................................. 2-9
2-18 Using the MultiFlo TM Configurator ................................................................................................. 2-10
2-19 Electrical Connections .................................................................................................................. 2-12
2-19-1 DeviceNet Connections ................................................................................................................ 2-12
2-19-2 Analog/RS485 Connector ............................................................................................................. 2-13
2-19-3 Profibus Connections ................................................................................................................... 2-14
2-19-4 EtherCAT Connections ................................................................................................................. 2-14
2-19-5 Alarm Output (Analog I/O Version Only) ....................................................................................... 2-15
Section 3 Operation
3-1 General .......................................................................................................................................... 3-1
3-2 Theory of Operation for Flow Measurement ................................................................................... 3-1
Section 4 Maintenance & Troubleshooting
4-1 Overview ........................................................................................................................................ 4-1
4-2 Maintenance .................................................................................................................................. 4-1
4-3 Troubleshooting ............................................................................................................................. 4-2
4-4 Troubleshooting Checklist .............................................................................................................. 4-3
4-5 GF40/GF80/GF81 Series Troubleshooting Guide .......................................................................... 4-4
Section 5 Product Description Code ...................................................................................................... 5-1