Brooks Instrument GF81 - Manual (Page 13)

1-7
Brooks ® GF40/GF80/GF81 Devices
Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013 Section 1 Introduction
Enhanced Diagnostics and User Interface
The mass flow controller is typically the most complex and critical
component in a gas delivery system, When dealing with toxic or reactive
gases, removing the MFC to access its functionality should be the last
resort. To address this, Brooks GF Series devices include self-diagnostics
and an independent service port for in-situ device evaluation and
troubleshooting:
• Embedded self-test routines at power-up
• Independent RS485 service port that can be accessed while the MFC is
in operation for data logging and troubleshooting
• A convenient Zero button to enable easy re-zeroing during scheduled
maintenance
Communication Interfaces
The GF40/GF80/GF81 Series supports 0-5 Vdc, 4-20 mA, DeviceNet,
EtherCAT, and Profibus communication protocols. DeviceNet, Profibus,
and RS485 are multi-drop connections that allow a maximum of 64 devices
for DeviceNet, 128 devices for Profibus, 32 devices for RS485, and 65,535
devices for EtherCAT to be connected on the same network.
Brooks Instruments' DeviceNet profile has been certified by the ODVA
(Open DeviceNet Vendor's Association).
Brooks Instrument Profibus interface has been certified by the PNO
(Profibus User Organization).
The Brooks Instrument EtherCAT interface has been successfully tested
by the EtherCAT Conformance Test application version 1.20.30.0.
1-11 Product Description for GF81 Series Devices
C o n t r o l
The Brooks GF81 Series is a high flow version of the GF80 featuring a
corrosion-resistant Hastelloy C-22 for durable, long term operation. Sub-1
second settling times and 1% of reading accuracy ensures that the GF81
will provide reliable flow measurement or control in demanding gas flow
applications. The GF81 achieves excellent internal to external leak integrity
for challenging process gases as found in CVD, solar, and other
processes. With a wide range of digital and analog I/O options available,
the GF81 represents an extremely powerful, yet easy, upgrade for existing
MFCs or MFMs.
1-12 Specifications for GF40/GF80/GF81 Series Devices