Brooks – Brooks Instrument GF81 User Manual

Page 17

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1-11

Brooks

®

GF40/GF80/GF81 Devices

Installation and Operation Manual
X-TMF-GF40-GF80-Series-MFC-eng
Part Number: 541B161AAG
June, 2013

Section 1 Introduction

Figure 1-2 Dimensions - GF40 Series

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